介质与静压对激波管校准压阻式绝压传感器动态特性的影响

李博; 黄楠; 杨军; 秦海峰; 尹肖; 张兆晶

doi:10.11883/bzycj-2019-0309

介质与静压对激波管校准压阻式绝压传感器动态特性的影响

doi: 10.11883/bzycj-2019-0309

李博^1,,
黄楠²,
杨军¹,
秦海峰¹,
尹肖¹,
张兆晶³

1.
北京长城计量测试技术研究所，北京 100095
2.
中国北方车辆研究所，北京 100072
3.
北京精密机电控制设备研究所，北京 100076

基金项目: 国家“十三五”技术基础项目（JSJL2015205B015）

详细信息

作者简介:
李　博（1990－　），男，硕士，工程师，libo@cimm.com.cn

中图分类号: O354.5; TB935
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- 被引次数: 11
出版历程
- 收稿日期: 2019-08-11
- 修回日期: 2019-11-04
- 刊出日期: 2020-05-01

Effects of medium and static pressure on dynamic characteristics of piezoresistive absolute pressure sensor calibrated by shock tube

1.
Changcheng Institute of Metrology & Measurement, Beijing 100095, China
2.
China North Vehicle Research Institute, Beijing 100072, China
3.
Beijing Institute of Precise Mechatronics and controls, Beijing 100076, China

摘要

摘要: 激波管通常用于动态压力传感器的校准，压阻式绝压传感器在激波管校准过程当中，会出现谐振频率等动态性能指标随着激波管静态压力环境、气体介质变化而改变的情况，影响传感器动态特性的校准。基于压阻式传感器的工作原理，对传感器的敏感膜片结构进行了机理分析，建立了膜片结构与校准环境中介质和静压关系的动态模型；通过ANSYS与SIMULINK软件开展了数值模拟验证工作，模拟结果与理论推导一致。通过激波管校准实验验证了气体介质与静压的影响关系，结果表明：传感器的谐振频率与静压间存在非线性关系，并且随着敏感膜片径厚比的增大而显著增大；系统阻尼比大小与气体介质有关，随着气体密度的降低而升高；传感器的灵敏度与气体介质和静压无太大直接关系。在使用激波管校准压阻式绝压传感器时，应当考虑介质与静压参数对校准结果的影响。
- 激波管 /
- 阶跃压力 /
- 动态特性 /
- 压阻式传感器 /
- 绝压传感器 /
- 动态校准
Abstract: Shock tube was usually used to calibrate the dynamic pressure sensor. During the calibration process of shock tube, the dynamic performance indexes of piezoresistive absolute pressure sensor, such as resonance frequency, depend on both the static pressure environment and gas medium of shock tube, affecting the calibration of dynamic characteristics of the sensor. Based on the working principle of piezoresistive pressure sensor, the mechanism of the sensing diaphragm structure was analyzed and a dynamic model was established. The numerical simulations using ANSYS and SIMULINK softwares have been performed and the simulation results are consistent with the theoretical predications. The results indicated that there was a non-linear relationship between the resonant frequency and the static pressure of the sensor, and it increased significantly with the increase of the diameter-thickness ratio of the sensing diaphragm. The damping ratio coefficient was related to the gas medium and increased with the decrease of gas density. The sensitivity of the sensor was related to neither the gas medium nor the static pressure. The effects of medium and static pressure parameters on the calibration of piezoresistive absolute pressure sensor should be considered.
- shock tube /
- step pressure /
- dynamic characteristics /
- piezoresistive sensor /
- absolute pressure sensor /
- dynamic calibration

HTML全文

图 1 硅压阻式传感器结构示意图

Figure 1. Structural schematic diagram of silicon piezoresistive sensor

下载: 全尺寸图片幻灯片

图 2 周边固支圆平膜片剖面图

Figure 2. Cross-sectional profile of peripheral fixator diaphragm

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图 3 膜片建模坐标系

Figure 3. Coordinate system for modeling of diaphragm

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图 4 膜片位移模拟结果

Figure 4. Simulation results of diaphragm deformation

下载: 全尺寸图片幻灯片

图 5 ${C_0}/H$ 随 $R/H$ 和压力的变化规律

Figure 5. Variation of ${C_0}/H$ with $R/H$ and pressure

下载: 全尺寸图片幻灯片

图 6 ${{\left[ {f\left( p \right) - f\left( 0 \right)} \right]} / {f\left( 0 \right)}}$ 随 ${R / H}$ 和压力的变化规律

Figure 6. Variation of ${{\left[ {f\left( p \right) - f\left( 0 \right)} \right]} / {f\left( 0 \right)}}$ with $R/H$ and pressure

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图 7 压力传感器膜片动力学模型

Figure 7. Dynamic model of pressure sensor diaphragm

下载: 全尺寸图片幻灯片

图 8 不同气体介质阶跃压力下膜片位移输出

Figure 8. Diaphragm deformation versus time under step pressure of different types of media

下载: 全尺寸图片幻灯片

图 9 负压激波管实验装置结构示意图

Figure 9. Structural schematic diagram of negative pressure shock tube test device

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图 10 激波管校准传感器的输出响应曲线

Figure 10. Output response curves of shock tube calibration sensors

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表 1 实验结果

Table 1. Experimental results

实验	绝对压力p₁/kPa	膜片厚度/mm	平台时间/ms	Δp₅/kPa	传感器输出/mV	灵敏度/(mV·kPa⁻¹)	谐振频率/kHz	阻尼比系数
1	3.6	0.1	8.7	2.6	5.89	2.26	159.4	0.000 14
2	3.6	0.1	8.7	2.5	5.68	2.27	159.4	0.000 14
3	3.4	0.1	8.6	2.2	5.12	2.32	159.2	0.000 13
4	12.8	0.1	10.1	3.6	8.23	2.28	159.6	0.000 18
5	33.9	0.1	10.7	5.1	12.03	2.35	160.0	0.000 35
6	33.9	0.2	10.2	7.5	17.23	2.30	160.0	0.000 39
7	33.8	0.3	9.8	13.2	30.43	2.31	160.1	0.000 38
8	33.9	0.6	8.5	21.5	48.78	2.27	160.1	0.000 47
9	101.3	0.3	10.6	13.8	31.43	2.27	162.5	0.000 89
10	101.3	0.3	12.6	13.9	31.27	2.25	162.8	0.000 34

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